Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system

as ‘Specifications’). The equipment listed in Schedule V are the lots that the tender comprises. Tenderers may bid for one or more lots. The subject matter of the contract, in all cases, does not include so-called refurbished scientific instruments and equipment. The single lot comprising the tende

r is as follows: Supply, installation, commissioning, acceptance testing and training of a high-performance Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system intended for micro- and nanofabrication.