- Art
- 16
- Verfahren
- open
- Referenznummer
- 204548-2024
- Geschätzter Wert
- 415,000 EUR
- CPV
- 38000000
The MESA+ Institute will invest in a UHV Sputter system to replace the current UHV Sputter systems with a state-of-the-art system that will bring more advanced process control and better process conditions (by means of a…
UHV system) to the lab. The system will be used for the deposition of metals onto various samples that have been processed in one or more deposition / lithography steps within the NanoLab facilities. Among these depositions, we outline a few below: Deposition of Au layers for good electrical cont
act to electronic devices (typically combined with a Ti interlayer for improved adhesion of the deposited film). Deposition of Nb layers for superconducting quantum devices such as Josephson junctions or SQUID devices (typically combined w