- Art
- 25
- Verfahren
- neg-wo-call
- Referenznummer
- 324251-2026
- CPV
- 38000000
THE SUBJECT OF THE PROCUREMENT The subject of the procurement is a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system for deposition of dielectric thin films (SiO₂, SiN, TEOS, SiON, a…
Si) for research and pilot line use in the VTT Micronova cleanroom. DIRECT AWARD, Article 40 2(2) of Finnish Procurement act (1397/2016) The procurement will be carried out as a direct award in accordance with 40 article Section 2(2) of the Finnish Public Procurement Act. According to the 40 § sect
ion 2(2) of the Act on Public Contracts (1397/2016), only a certain supplier can implement the procurement for a technical reason, or for a reason related to protecting an exclusive right; it shall be a further condition that there are no r