JPA2025ID81 - 1

et and patterned wafers 800 – 1700 nm wavelength detection range Panchromatic detector for fast defect mapping Spectrum acquisition (≥250 nm range with one scan

Cathodoluminescence (CL) tool: Clean-room compatible with EFEM (Equipment Front End Module) for automatic loading of 200 and 300 mm substrates Fast acquisition of CL and scanning electron microscopy (SEM) images on blank