Photomasks

minor order needs in other VTT locations in Finland. The Micronova cleanroom is equipped with standard semiconductor industry process equipment including Canon FPA3000-i4 5x wafer stepper and three mask aligners. End products are for example active silicon devices, radiation detectors, MEMS devices

and various thin film devices. VTT uses different types of photomasks. The object of the tender process is described in more detail in the invitation to tender documents.