Vacuum infrastructure for the Materials Innovation Cluster (MIC) at PSI

platform is called Materials Innovation Cluster (MIC) at Paul Scherrer Institute, Switzerland. For details see the Requirements Specification PSI-PD37-001 Rev.1.0.

Technical design, manufacturing, and installation of an ultra-high vacuum (UHV) infrastructure connecting several experimental facilities for thin film deposition and in situ characterizations. The complete experimental