Scanning Electron Microscope

strument shall include standard back scattered electrons and secondary electrons detectors as well as cathodoluminescence detector. The SEM to be purchased will replace our current LEO 1550 used since 1997.

Instrument to be purchased is a Scanning Electron Microscope (SEM) for 200 mm standard wafer compatibility. An automated measurement over entire wafer is required. Also, EDS detector and 3D metrology are required. The in