Defect inspection system

line and end-of-line in the Front-end process). The tool must be capable of detecting particles, voids, cracks, scratches, pits, bumps, and hazes in the pattern. The materials of the patterns that the machine must be able to analyze are silicon oxides and nitrides, polysilicon, metals, and photoresi

st. The object of the tender process and the technical requirements are described in more detail in the invitation to tender documents.