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III-V ICP Etcher

Deadline:26 Sept 2025

Tender information

TED EU

Kgs. Lyngby, Denmark

Type
16
Procedure
open
Ref. number
561059-2025
CPV
38000000

DTU requires an ICP reactive ion etcher to etch III-V materials with a special focus on etching GaAs micropillar devices from a planar microcavity (“the Instrument”). The system is expected to be delivered as soon as pos

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