Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes
Tender information
TED EUFrankfurt (Oder), Germany
- Type
- 29
- Procedure
- open
- Ref. number
- 212739-2026
- CPV
- 42940000
Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes