164 - System zur Elektronenstrahllithografie (EBL-System)
Tender information
TED EUAachen, Germany
- Type
- 29
- Procedure
- open
- Ref. number
- 767465-2025
- Estimated value
- 2,090,672 EUR
- CPV
- 38000000
System zu Elektronenstrahllithografie
Aachen, Germany
System zu Elektronenstrahllithografie