Plasma Ashing System
Deadline:11 Jul 2025, 00:00 CEST
Tender information
TED EUGarching, Germany
- Type
- 16
- Procedure
- open
- Ref. number
- 365129-2025
- CPV
- 38000000
The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with hig…