Cluster ALE/ICP/RIE + PECVD + ALD (HHI-07) - PR865241-3220-P
Tender information
TED EUMünchen, Germany
- Type
- 29
- Procedure
- neg-wo-call
- Ref. number
- 498687-2025
- CPV
- 31712330
The required cluster tool should include a loadlock and a handler, three separate process chambers for ALE/ICP/RIE (Atomic Layer Etching/Inductively Coupled Plasma/Reactive Ion Etching), ALD (Atomic Layer Deposition), an…