tender for a batch spray tool
Tender information
TED EUKgs. Lyngby, Denmark
- Type
- 29
- Procedure
- open
- Ref. number
- 566153-2025
- Estimated value
- 978,890 EUR
- CPV
- 38000000
DTU Nanolab requires one spray tool equipped with ozone, HF, HCl and NH4OH for wafer cleaning purposes. The tool is to be able to handle batch processing (up to 25 wafers per run). The tool will be used in our ISO 14644-…