- Type
- 16
- Procedure
- open
- Ref. number
- 683630-2024
- Estimated value
- 1,900,000 EUR
- CPV
- 38000000
The XUV Optics Group in MESA+ Institute at University of Twente tends to invest in the XUV Piezo Cluster to carry research on piezoelectric film-based sensors and actuators. The aim is to scale up the piezoelectric film …
coating capabilities to larger substrate dimensions with more advanced process control systems that enable to explore a broader process window. The XUV Piezo Cluster will be used for the deposition of pure metals, metallic oxides and piezoelectric layers onto various substrates to be further proce
ssed using photolithography and deposition steps in the MESA+ Nanolab facilities. Brief description of the capabilities is outlined below: The XUV Piezo Cluster shall be capable of processing at least 200 mm diameter substrates. The XUV