Prior information notice: Advanced oxide and metal etcher & plasma etch cluster tool

E NOTE: For technical reasons, it has been necessary to indicate a tender submission period in this notice; however, tenders should not to be submitted in response to this notice, nor is there any requirement to express interest in participating at this stage. The contracting authority intends to ap

ply an open procurement procedure, in which all economic operators may participate once the invitation to tender has been published. The selection criteria will be defined in the invitation to tender. PRIOR INFORMATION NOTICE The contractin