Scanning Electron Microscope

Due to a recently identified bottleneck in the suite of high-end characterisation in the cleanroom, DTU wishes to acquire a SEM. This problem has arisen as the result of multiple breakdowns among the aging and current instruments thus exposing an unexpected vulnerability in the overall process flow

of several of our commercial users. The instrument is intended to meet the characterization requirements of DTU’s key commercial customers. Accordingly, only a high-end system equipped with a field emission source, capable of delivering hi