Glovebox with integrated evaporator deposition tool and integrated dual target sputtering tool with capability of coupling to an Atomic Layer Deposition (ALD) Tool

materials deposition capability utilizing RF sputtering and evaporation for synthesis and multi-parametric test of liquid, polymer and solid-state systems for energy devices. The equipment will be used for liquid, polymer and all solid-state stacks of energy devices to be fabricated with the interfa

ce control giving enhanced energy and power density and device lifetimes. In particular, the RF sputter tool will enable true solid state electrolyte deposition. This integrated research tool will enable analysis of the key role of the inte