Plasmapro 100 Cobra
Tender information
TED EUKøbenhavn K, Denmark
- Type
- 29
- Procedure
- neg-wo-call
- Ref. number
- 113206-2025
- Estimated value
- 446,196 EUR
- CPV
- 38000000
We are purchasing an ICP dry etching machine for the KU cleanroom, to be installed with fluorine-based chemistry within the cleanroom. It will be optimized for the etching silicon nitride structures on both silicon and G…