Plasma oxidation module (200mm, CMOS) for mounting vapor deposition cluster tool - PR847550-2270-W
Tender information
TED EUMünchen, Germany
- Type
- 29
- Procedure
- open
- Ref. number
- 107898-2025
- Estimated value
- 0 EUR
- CPV
- 31712330
Plasma oxidation module (200mm, CMOS) for mounting vapor deposition cluster tool