Picosecond ultrasonics film thickness measurement tool
Tender information
TED EUVTT, Finland
- Type
- 25
- Procedure
- neg-wo-call
- Ref. number
- 284807-2026
- CPV
- 38300000
Cassette-to-cassette measurement system using picosecond ultrasonics for materials characterization in semiconductor processes, enabling metal thickness metrology, implant monitoring, and thermal conductivity characteriz…