JPA2025ID20 a - 1
Tender information
TED EUHeverlee, Belgium
- Type
- 16
- Procedure
- neg-w-call
- Ref. number
- 136813-2025
- CPV
- 38000000
Its object is the supply and commissioning of a new BEOL Etch Cluster. • 300mm Dry Etch/Strip Platform containing 3 Process Modules as described below: • Metal Dry Etcher capable of Metal, Metal Oxides and various HM (Ha…