Los 1: Precise ion beam based trenching tool (IMWS-03.2)
Tender information
TED EUMünchen, Germany
- Type
- 16
- Procedure
- neg-w-call
- Ref. number
- 272733-2025
- CPV
- 38511100
Precise ion beam based trenching tool (IMWS-03.2) + high performance Ga-FIB sample preparation (IMWS-08.1) + high performance analyical SEM inspection (IMWS-08.2)