LA3024C RFT for a Direct Write Laser Lithography Tool for University College Cork

nal Institute for the advanced heterogeneous of semiconductor devices. We invite proposals for an advanced direct write laser lithography tool that is capable of resolving features down to 0.3um. The system should also be capable of grayscale lithography enabling the creation of complex 3D microstru

ctures for advanced research and development applications. This equipment will be essential for filling the gap between our current optical lithography and e-beam lithography capabilities. The ideal tool will offer precision, reliability, a