- Type
- 29
- Procedure
- neg-wo-call
- Ref. number
- 212531-2024
- Estimated value
- 1,000,000 EUR
- CPV
- 73000000
ALD (atomic layer deposition) technology is crucial in cleanroom processing in MEMS. Picosun Oy has been VTT’s tenant for several years by renting space from VTT cleanroom for its equipment, for example to run a demo ALD…
tool. Picosun gives VTT the right to use ALD so that VTT’s own personnel can operate Picosun equipment. Processing of MEMS and other devices on silicon wafers is very sensitive and takes place in a controlled cleanroom environment, where the wafers must be handled and processed by qualified operato
rs/researchers. Using an external fab for processing would mean shipping partly processed wafers after some process steps to another facility and then back to continue the processing with VTT’s own equipment. This poses risks to induce part