a high-quality thin-film deposition system for advanced materials research

d for the deposition and engineering of magnetic metallic and oxide thin films and multilayer stacks with nanometer-scale thickness control. The equipment will primarily be used for the fabrication of magnetic (multilayer) thin films and wedges for nanomagnetic research. The system must therefore pr

ovide a high degree of flexibility, reproducibility, process stability and automation. For Technical details see part III Lot 2 Explanation To facilitate exploratory research in the UGent cleanroom, a new physical vapor deposition (PVD) sys