- Type
- 29
- Procedure
- open
- Ref. number
- 224374-2024
- Estimated value
- 508,900 EUR
- CPV
- 38000000
The purpose of this contract is to provide a new multi-user evaporation system designed for a wide range of experiments. This system aims to replace an existing deposition system that has been in use for over 20 years. T…
he primary objective is to enhance the capabilities of the current system. The desired outcome is a cutting-edge one main chamber setup equipped with a single wafer handler and a load-lock. This upgraded system will serve the purpose of depositing various types of materials, equipped with a dual ele
ctron beam gun to have the possibility to do co-evaporation. Additionally, the system should be equipped with an ion beam source for reactive ion beam assisted deposition and sample cleaning.