Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes
Deadline:16 Jan 2026, 00:00 CET
Tender information
TED EUFrankfurt (Oder), Germany
- Type
- 16
- Procedure
- open
- Ref. number
- 797863-2025
- CPV
- 42940000
Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes