- Type
- 16
- Procedure
- open
- Ref. number
- 122007-2026
- Estimated value
- 2,500,000 SEK
- CPV
- 38000000
The procurement concerns the complete delivery of an Evaporator including a process chamber, vacuum pumps, a control system and software, documentation and training on-site. Linköping University (LiU) is procuring a vacu…
um deposition system (Evaporator) for coating of thin films for the clean room facility of Täppan at the Department of Science and Technology (ITN). In this system, a solid material will be heated to such a high temperature that the particles can travel to the target surface under high vacuum and fo
rm a homogenous thin coating.LiU requires an Evaporator with physical vapor deposition (PVD) via thermal and e-beam methods with precise control over the deposition (i.e. thickness and rate). This will allow the deposition of a wide range o