Notice of Intent to Noncompetitively Acquire Rapid Thermal Annealing (RTA) system

of Standards and Technology located in Boulder, Colorado has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-

Fabrication Facility (BMF). One of the tools in the BMF is a Rapid Thermal Annealing (RTA) system that is used to anneal films from substrates. The BMF currently has a system that can anneal substrates with a size of up to 100 mm, but the B