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Precursor for MOCVD system

Tender information

DE_BKMS

Frankfurt (Oder), Germany

Type
goods (award)
Procedure
Open
Ref. number
3c43d5eb-0539-4764-919a-383900f0ba9e
CPV
24100000

1 73Ge depleted germane gas (GeH4) - 73Ge isotopic depletion < 0.1% - chemical purity VSLI grade or better - metal ion concentration (per element) <50 ppb - particle concentration <250/ml - 2% GeH4 dilution with additi

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