DRIE etch cluster (Mainframe + 3 Chambers) (IPMS-MRS07.1; IPMS-MRS07.2; IPMS-MRS08.1; IPMS-MRS08.2) - PR882587-2480-P

München, Germany

Type

goods (award)

Procedure

Negotiated with prior publication of a call for competition / competitive with negotiation

Ref. number

170403e1-fba8-4233-9a2e-1deb5d89200f

CPV

42990000

Documents