Plasma oxidation module (200mm, CMOS) for mounting vapor deposition cluster tool - PR847550-2270-W
Tender information
DE_BKMSMünchen, Germany
- Type
- goods (award)
- Procedure
- Open
- Ref. number
- c6203eda-50d3-411c-92bc-30e6590695f2
- CPV
- 31712330
Plasma oxidation module (200mm, CMOS) for mounting vapor deposition cluster tool