Integrated Measurement System CMP04
Deadline:10 Nov 2025, 14:00 CET
Tender information
DE_BKMSGermany
- Type
- tender
- Procedure
- Public announcement
- Ref. number
- 24600066
For an Ebara F-EX200M2 chemical-mechanical-polishing (CMP) system an integrated measurement system is needed. The CMP system is prepared with so called "NOVA ready - kit" which means all connections and the tool frame fo…