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XYZ Phi stage for wafers up to 12 inches (IMS-06.1) & 6-Axis Hexapods + Controllers (IMS-06.2) - PR1046956-2380-P

Deadline:23 Oct 2025, 11:00 CEST

Tender information

DE_BKMS

München, Germany

Type
goods (tender)
Procedure
Open
Ref. number
e708d4ba-fbab-42a8-8ae1-7e4c893796c5
CPV
42990000

IMS needs a semi-automatic test setup for fast characterization of photonic integrated circuits (PIC) and devices on a wafer scale. The setup consists of a six degree of freedom (6D) nanopositioning system and of a rotat

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