XYZ Phi stage for wafers up to 12 inches (IMS-06.1) & 6-Axis Hexapods + Controllers (IMS-06.2) - PR1046956-2380-P
Deadline:23 Oct 2025, 11:00 CEST
Tender information
DE_BKMSMünchen, Germany
- Type
- goods (tender)
- Procedure
- Open
- Ref. number
- e708d4ba-fbab-42a8-8ae1-7e4c893796c5
- CPV
- 42990000
IMS needs a semi-automatic test setup for fast characterization of photonic integrated circuits (PIC) and devices on a wafer scale. The setup consists of a six degree of freedom (6D) nanopositioning system and of a rotat…