Inline automatic optical inspection (AOI) with high-speed Analysis for QMI systems

system handles 200 mm wafers as well as frames, tapes, trays and comparable substrates. An end‑to‑end carrier handling system loads carriers with mounted substrates from specialized cassettes, positions them on the prober's vacuum chuck and performs fully automated alignment. A testcard/probe‑card i

nterface is provided for electrical connection. Probe detection and fine positioning are performed automatically to ensure reproducible contact conditions. The control software supports program-mable sequence control and reference‑point bas