Lieferung eines Atomic Layer Deposition system PEALD
Tender information
DE_BKMSKarlsruhe, Germany
- Type
- goods (award)
- Procedure
- Negotiated without prior call for competition
- Ref. number
- b6c2d9f3-54ce-4f34-8800-a1c14dfbc1d0
- CPV
- 42990000
Gegenstand dieser Ausschreibung ist die Lieferung eines GEMStar XT-DP, Thermal and Plasma enhanced Atomic Layer Deposition system PEALD with dual manifold zones up to 8 precursors including 2 precursor bottles + heater j…