Precise ion beam based trenching tool (IMWS-03.2) + high performance Ga-FIB sample preparation (IMWS-08.1) + high performance analyical SEM inspection (IMWS-08.2) - PR924050-2690-P

München, Germany

Type

goods (award)

Procedure

Negotiated with prior publication of a call for competition / competitive with negotiation

Ref. number

90ac6b5c-151c-4c2b-b8b4-65b36e6c2212

CPV

38511100

Documents