164 - System zur Elektronenstrahllithografie (EBL-System)
Tender information
DE_BKMSAachen, Germany
- Type
- goods (award)
- Procedure
- Open
- Ref. number
- 614a1e88-ee92-4d0c-a392-7c7dc08a355c
- Estimated value
- 1,680,672 EUR
- CPV
- 38000000
System zu Elektronenstrahllithografie