System for High Apect Ratio Etch consisting of mainframe and process chambers (IPMS-CNT05.1) - PR1153448-2480-P

München, Germany

Type

goods (tender)

Procedure

Negotiated with prior publication of a call for competition / competitive with negotiation

Ref. number

8a49c91c-d59f-43b4-a51b-e980aba81b16

CPV

42990000

Documents