XYZ Phi stage for wafers up to 12 inches (IMS-06.1) & 6-Axis Hexapods + Controllers (IMS-06.2) - PR1046956-2380-P

ion stage. A six degrees of freedom (6D) nanopositioning system in photonics is used to precisely position optical fibers and fiber arrays, facilitating accurate optical coupling with photonic integrated circuits and devices. The precise control of six degrees of freedom (three Cartesian and three a

ngular coordinates) ensures optimal alignment and efficient probing of photonic structures on wafers and dies. Two pieces of 6D nanopositioners are needed - one for the input and one for the output of the PIC. A rotation stage with position