300 mm BEOL large field exposure system, fully automated (IZM-132) - PR1184859-3460-P
Tender information
DE_BKMSMünchen, Germany
- Type
- goods (tender)
- Procedure
- Negotiated with prior publication of a call for competition / competitive with negotiation
- Ref. number
- 1653ed3e-9f23-49d7-8daf-51ce023ca9ca
- CPV
- 31712100
300 mm BEOL large field exposure system, fully automated (IZM-132)