Single Wafer ALD for TiN (IPMS-MRS05.1) - PR896468-2480-P
Tender information
DE_BKMSMünchen, Germany
- Type
- goods (award)
- Procedure
- Negotiated with prior publication of a call for competition / competitive with negotiation
- Ref. number
- 3d2aa7c6-867d-40cf-a666-1f346804e252
- CPV
- 42990000
Single Wafer ALD for TiN (IPMS-MRS05.1)