Plasma Ashing System
Deadline:11 Jul 2025, 12:00 CEST
Tender information
DE_BKMSGarching, Germany
- Type
- goods (tender)
- Procedure
- Open
- Ref. number
- e2933cae-386d-4f10-a4a8-75fc250afd2c
- CPV
- 38000000
The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with hig…