Standard Cleaning Batch Tool for 130 nm Technology on 200mm Si wafers
Tender information
DE_BKMSFrankfurt (Oder), Germany
- Type
- goods (award)
- Procedure
- Open
- Ref. number
- 4f371b5d-032c-457f-a581-14c33bda0418
- CPV
- 31712100
Standard Cleaning Batch Tool for 130 nm Technology on 200mm Si wafers