Cluster ALE/ICP/RIE + PECVD + ALD (HHI-07) - PR865241-3220-P
Tender information
DE_BKMSMünchen, Germany
- Type
- goods (award)
- Procedure
- Negotiated without prior call for competition
- Ref. number
- ef6f45d2-66c2-4905-ac34-1014dbc823ee
- CPV
- 31712330
The required cluster tool should include a loadlock and a handler, three separate process chambers for ALE/ICP/RIE (Atomic Layer Etching/Inductively Coupled Plasma/Reactive Ion Etching), ALD (Atomic Layer Deposition), an…