Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes
Tender information
DE_BKMSFrankfurt (Oder), Germany
- Type
- goods (award)
- Procedure
- Open
- Ref. number
- 254c3fa4-c5fd-468a-8fc5-198b53affede
- CPV
- 42940000
Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes