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Silicon Austria Labs –Deep Ultraviolet (DUV) Lithography Systems

Tender information

TED EU

Graz, Austria

Type
29
Procedure
neg-w-call
Ref. number
797718-2025
Estimated value
5,499,039 EUR
CPV
38000000

The aim of the procurement procedure was to commission the best bidder identified in the course of the procurement procedure to supply and install a deep ultraviolet (DUV) KrF-based exposure stepper (hereinafter referred

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