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Plasma enhanced chemical vapour deposition tool

Tender information

TED EU

VTT, Finland

Type
25
Procedure
neg-wo-call
Ref. number
324251-2026
CPV
38000000

THE SUBJECT OF THE PROCUREMENT The subject of the procurement is a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system for deposition of dielectric thin films (SiO₂, SiN, TEOS, SiON, a

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