With the growth of the cleanroom space, the time to transport FOUPs from tool to tool is becoming more significant in the overall cycle time. As the beyond 2nm SoC pilot line will include tools spread over four different…
cleanrooms, logistics time will have to be kept under control by linking the stockers using an overhead Automated Material Handling System (AMHS), to reduce the number of operations and human interventions. We are looking to purchase a AMHS system (hardware) with supporting software package.
With the growth of the cleanroom space, the time to transport FOUPs from tool to tool is becoming more significant in the overall cycle time. As the beyond 2nm SoC pilot line will include tools spread over four different